摘要
采用Sol-gel法,在普通载玻片上使用旋转涂覆技术生长了具有c轴择优取向生长的ZnO薄膜。用热分析、XRD、SEM等手段对薄膜样品进行了表征。热分析结果表明:二水醋酸锌-乙醇胺-乙二醇甲醚体系Sol-gel的热分解过程与纯二水合乙酸锌的分解过程大相径庭。ZnO薄膜的Sol-gel分解趋于在较窄的温度范围内一步完成。在Si(111)衬底和玻璃衬底上生长了ZnO薄膜,都表现出明显的c轴择优取向生长。对比了不同涂覆层数对ZnO薄膜结构及表面形貌的影响,ZnO薄膜的c轴择优取向生长特性随着涂覆层数的增加而减弱,这是由于ZnO薄膜的生长模式由层状生长向岛状生长转变所致。ZnO薄膜在可见光范围的透光率超过85%。
Zinc oxide thin films with c-axis orientation on glass and Si （ 111 ） substrates were prepared by Sol-gel spin coating technique, which were characterized by DSC/TGA, X-ray diffraction and SEM. DSC/TGA results show that thermal decomposition processes of the precursors are widely different from those of zinc acetate dihydrate, monoethanolamine and 2-methoxyethanol. ZnO thin films grown on Si （111 ） and glass both show obvious c-axis orientation. The influence of thickness on the structure and surface morphology of ZnO thin films were investigated, the c-axis orientation characteristic of ZnO thin films weaken with the increase of coating layers, the reason are considered that the growth mode of ZnO thin films transformed from layer growth to island growth. The average transmittance of ZnO thin films in the visible range was beyond 85 %.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2008年第4期1003-1007,共5页
Journal of Synthetic Crystals
基金
教育部高等学校骨干教师资助计划项目(GG-430-11902-1010)
