摘要
本文先将氮化铝陶瓷氧化,然后在氧化层上采用Mo-Mn法对氮化铝陶瓷进行金属化,通过对氮化铝陶瓷、氧化层、金属化层的显微结构、成分变化、元素的分布情况来探讨金属化的烧结过程,分析氮化铝陶瓷的Mo-Mn法金属化机理。实验结果表明使用Mo-Mn法可以实现牢固的金属化,其强度达到62 MPa;其机理是氮化铝陶瓷表面的氧化层中的Al_2O_3在金属化过程中Al_2O_3溶解到金属化层中形成玻璃相,同时金属化层中的氧化物向氧化层中迁移扩散,实现氮化铝陶瓷氧化层-金属化层的结合。
In this research,aluminum nitride ceramics are first oxidized,and then the ceramics are metallized on the oxide layer by Mo-Mn method.By analyzing the microstructure,the composition change and the elementsdistribution of metallization layers,the metallization sintering process was discussed,and the Mo-Mn metallization mechanism of aluminum nitride ceramics was investigated.The experimental results show that strong metallization can be achieved by using Mo-Mn method,and the metallization strength can reach 62 MPa.The mechanism of Mo-Mn methodis that the Al2O3 in the oxide layer on the surface of the aluminum nitride ceramic dissolves into the metallized layer to form a glass phase during metallization process,meanwhile the oxides in the metallization layer migrate and diffuse into the oxide layer,andso achieving close integration of the oxide layer and the metallization layer of aluminum nitride ceramics.
作者
陈欣
杨洁
黄刚
李天涛
向军
陈弹蛋
刘平
CHEN Xin;YANG Jie;HUANG Gang;LI Tian-tao;XIANG Jun;CHEN Dan-dan;LIU Ping(Institute of Fluid Physics,CAEP,Mianyang621900,China)
出处
《真空电子技术》
2019年第1期60-64,77,共6页
Vacuum Electronics
基金
四川省科技计划资助项目(2018GZ0150)
关键词
Mo-Mn法
氮化铝陶瓷
金属化层
氧化
Molybdenum-manganese method
AlNceramics
Metallization layer
Oxidizing
