摘要
BST薄膜是微电子器件领域很有吸引力的介质材料.就BST薄膜研究中电极材料选择这一焦点问题进行综述,包括电极材料的种类,电极对薄膜微观结构、介电参数及稳定性等方面的影响,分析与电极相关的薄膜缺陷和可靠性现象,并对未来的发展作简要的描述.
(Ba,Sr)TiO3 thin film is one of the most promising dielectric materials for microelectronic devices application. Review various electrode materials applied to BST thin capacitor and their effects on dielectric peoperties of BST films, including thin films microstructure, dielectric parameters and stability, and analyze the oxygen vacancyrelated defect and reliability phenomena in the films associated with the applied electrode. In addition, possible future trends are briefly summarized.
出处
《湖北大学学报（自然科学版）》
CAS
2003年第3期219-223,共5页
Journal of Hubei University：Natural Science
基金
湖北省自然科学基金资助项目(2001Z01007)
