摘要
BST铁电薄膜具有优异的介电性能,电极材料特别是底电极材料,影响并决定BST薄膜的电学及介电行为,选择合适的电极材料对BST薄膜的性能至关重要,本文综述了电极材料对BST薄膜结构和介电性能的影响以及此方面的最新研究成果。
BST thin film has outstanding dielectric property. It was discovered that the whole electrical properties of BST thin films are determined by the electrode materials, especially the bottom electrode. So chosen ＇the matching electrode material is very important. Reviewed are the achievements on the electrode of Ba1-xSrxTiO3 thin film in recent years, and the effect of electrode materials on dielectric properties and structures of BST thin films.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2008年第3期542-545,共4页
Bulletin of the Chinese Ceramic Society
基金
济南大学博士基金(B0518)
关键词
BST薄膜
电极材料
钙钛矿氧化物
介电性能
漏电流
BST thin film
electrode material
perovskite oxide conductive materials
dielectric property
leakage current
