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TiN薄膜厚度对耐磨性影响的研究 被引量:7

Effects of the Thickness of TiN Films on Wear Resistance
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摘要 利用空心阴极离子镀膜机在碳钢上制备TiN薄膜,采用销—盘式磨损试验机,在润滑条件下,研究不同厚度TiN薄膜的耐磨性. 结果表明:TiN薄膜厚度低于1μm时薄膜易碎,高于2μm时耐磨性明显提高。 In this paper, TiN film with different thickness are deposited on T7A steels by Hollow Cathode Discharge Ion Plating. Under lubrication, the wear resistance of TiN films are studied by the pin -disk wear tester. The results show that the thickness of Tin films has an effect on the wear resistance. During the same wear time, as the thickness of TiN is below 1um the film is damage easily, but the thickness is above 2um, the film is perfect.
作者 关世瑛
出处 《哈尔滨理工大学学报》 CAS 2003年第3期114-116,共3页 Journal of Harbin University of Science and Technology
关键词 氮化钛薄膜 离子镀 碳钢 耐磨性 薄膜厚度 表面强化技术 磨损痕迹形貌 TiN film thickness of the film wear resistance ion plating
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