摘要
随着微型机械、高密度磁记录技术的发展 ,其器件的润滑及磨损成为制约其发展的一个关键问题。纳米复合薄膜有望解决这一问题。对化学法制备纳米复合薄膜的方法进行了综述 ,重点对分子沉积膜的发展及应用进行了概述 。
The adhesion and wear in microelectro mechanical systems (MEMS) and high density magnetic recorder is a special problem. How to reduce them is a key technology in that field. Ultrathin film is a good method for solving the problem. This article reviews the chemical preparation method of ultrathin film. The application and preparation of molecular deposition film are also discussed.
出处
《机械工程材料》
CAS
CSCD
北大核心
2003年第3期1-3,7,共4页
Materials For Mechanical Engineering
基金
国家自然科学基金资助项目 ( 5 0 175 0 76)
关键词
纳米薄膜
自组装
分子沉积膜
nanofilm
self assembly
molecular deposition film
