摘要
采用nAERO辅助气溶胶薄膜沉积技术制备SnO_2∶F薄膜玻璃(FTO),研究了F掺杂量对SnO_2∶F薄膜结构和性能的影响,分别利用X射线衍射仪、扫描电镜、雾度测量仪、方阻测量仪、Lambda750分光光度计对所生产的玻璃薄膜的结构、形貌等进行了研究,讨论了F掺杂量对雾度、透过率、反射率、方阻等薄膜性质的影响。
F-doped SnO_2 films glass(FTO)were prepared by nAREO aerosol assisted thin film deposition techniques method,the effect of dopant on the structure and properties of SnO_2∶F films was studied.The structure,morphology and composition of the films were studied by means of X-ray diffraction(XRD),scanning electron microscopy(SEM),haze meter,square resistance measuring instrument and Lambda 750 spectrophotometer.The effects of dopant on the F haze,transmittance,reflectance,the sheet resistance and other film properties is discussed.
出处
《精细与专用化学品》
CAS
2014年第7期28-31,共4页
Fine and Specialty Chemicals
