摘要
针对As_(40)Se_(60)硫系玻璃特殊的性能特点,对所用的高性能红外减反射膜的设计和制备工艺进行了研究。介绍了减反膜的膜料选择、膜系设计以及膜层制备工艺优化的过程,给出了用该方法制备的8~12μm波段宽带减反射膜的实测光谱曲线,设计波段范围内其平均剩余反射率为1%,环境测试结果表明:膜层附着性能好,性能稳定。
According to the special performance of As_(40)Se_(60) Chalcogenide Glass,the design and deposition of high performance infrared antireflection coatings by ion assisted deposition are discussed. The choice of films materials and the design of coatings system are introduced. The measured spectral curve of 8-12 μm wavelength range antireflection coatings deposition by this method has been given. The experimental results show that the coatings have good characteristics such as a average reflection of 1% in the designed wavelength range,good adherence and stabilityof optical and mechanical properties.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2017年第S1期94-97,121,共5页
Bulletin of the Chinese Ceramic Society
关键词
光学薄膜
硫系玻璃
减反膜
离子辅助蒸发
optical coating
chalcogenide glasses
AR coating
ion assisted deposition
