摘要
As_(40)Se_(60)硫系玻璃基底沉积红外光学薄膜存在牢固性不足的缺点,以膜层牢固性为研究对象来解决膜层附着力问题。首先选择了合适的膜层材料,完成了膜系的设计及优化;然后以沉积温度为影响因素进行单因素实验,研究了ZnS连接层的镀制工艺和残余应力,采用无离子源辅助的办法降低了连接层的残余应力,提高了膜层附着力;最终解决了较高温度下的薄膜脱膜问题,研制了一种透过波段为8~12μm的红外增透膜,并确定了镀制工艺运用于实际生产。所制备的薄膜平均透过率为98%、平均反射率为0.6%,附着力、高低温、湿热实验满足GJB2845-1995标准中的要求。
Infrared optical coatings deposited on the As_(40)Se_(60) chalcogenide glass have the disadvantage of poor adhesion.The firmness of the coating has been a major research object to solve the problem of coating adhesion.First,the appropriate film source materials were chosen,and the design and optimization of the film system were completed.The single factor experiment was carried out with the deposition temperature as the influencing factor,and the deposition process and residual stress of the ZnS connection layer were examined.The method without an ion source was used to reduce the residual stress of the connection layer and improve film adhesion.Finally,the problem of coating adhesion at higher temperatures was solved.An infrared antireflective coating with an 8-12μm wavelength was developed,and the deposition process was applied to practical production.The average transmittance and reflectance of the prepared film were 98% and 0.6%,respectively.The adhesion,high and low temperature,and humidity experiment met the requirements of the GJB2845-1995 standard.
作者
刘卓
张友良
李刚
杨伟声
王雪颖
谢启明
杨晓京
Liu Zhuo;Zhang Youliang;Li Gang;Yang Weisheng;Wang Xueying;Xie Qiming;Yang Xiaojing(Yunnan KIRO Photonics Co.Ltd,Kunming 650217,Yunnan,China;Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500,Yunnan,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2023年第5期408-414,共7页
Laser & Optoelectronics Progress
关键词
薄膜
增透膜
硫系玻璃
连接层
红外光学
残余应力
thin films
antireflective coating
chalcogenide glass
connection layer
infrared optical
residual stress
