摘要
本研究采用一种新方法来改善类金刚石(DLC)薄膜在玻璃表面结合力弱的问题。首先通过反胶束微乳液刻蚀法在玻璃表面蚀刻出致密连续的微米凹坑,然后采用磁控溅射依次镀制SiO_(2)、SiOC过渡膜及DLC膜。由于薄膜物质嵌在连续的微米凹坑里形成波浪状的3D膜层,不仅可将应用在膜上的作用力分解释放,而且也大大提高了玻璃表面与膜的接触面积,从而显著增强DLC薄膜在玻璃表面的结合。为了改善薄膜在可见光区的透光性能,镀膜前,在玻璃球形凹坑的玻璃表面进行二次化学蚀刻,在凹坑里生成纳米孔结构,减少反射,提高可见光透过率。本研究采用紫外-可见分光光度计、扫描电镜、拉曼光谱仪、纳米力学综合测试系统、显微硬度仪及铅笔硬度测试等手段对样品进行了性能表征。结果表明,SiO_(2)、SiOC过渡层可以使玻璃基板与DLC薄膜之间结合力,从(28.82±0.62)mN提高到(53.32±0.78)mN,提高近1倍。在相同的DLC膜镀制条件下,玻璃表面的微米凹坑可进一步使DLC的膜基结合力再提高1倍,从(53.32±0.78)mN提高到(106.32±0.82)mN。显微硬度从543.7 HV提高到735.5 HV,铅笔硬度从6 H提高到7 H。通过二次化学蚀刻产生的纳米孔可使镀膜玻璃的可见光平均透过率提高约4%。
A new method was employed to improve the weak adhesion of diamond-like(DLC)films on the glass surface.Dense and continuous micron pits were first etched on the glass surface by inverse microemulsion etching,then followed by sequential magnetron sputtering of SiO_(2),SiOC and DLC films.Since the sputtered species were embedded in the continuous pits to form a wave-like 3D film layer,which might not only release the force applied to the film,but also greatly increase the contact area between the glass surface and the film,significantly enhancing the adhesion of the DLC film to the glass surface.In order to improve the vis-light transmission of the coated glass,the etched glass prior to sputtering was further subjected to the secondary chemical etching to generate nanoporous structure,reducing reflection and improving vis-light transmission.In this study,the samples were characterized by UV-Vis spectrophotometer,scanning electron microscope(SEM),Raman spectrometer,integrated nano-mechanical testing,microhardness testing and pencil hardness testing.The results show that the adhesion force between DLC films and the glass substrate was improved from(28.82±0.62)mN to(53.32±0.78)mN due to the deposition of SiO_(2) and SiOC transition layers.Moreover,under the same sputtering conditions,the adhesion force on the chemically etched glass surfaces can be further increased with one time,ie,from(53.32±0.78)mN to(106.32±0.82)mN.The microhardness was increased from 543.7 to 735.5 HV,and the pencil hardness was increased from 6 H to 7 H.The average vis-light transmission of the coated glass was increased with about 4%due to the nanoporous structure produced by the secondary chemical etching.
作者
刘源
熊春荣
贺建雄
周咏柳
姜宏
宋辉
LIU Yuan;XIONG Chunrong;HE Jianxiong;ZHOU Yongliu;JIANG Hong;SONG Hui(Skate Key Laboratory of Marine Resource Utilization in South China Sea,Special Glass Key Lab of Hainan Province,Hainan University,Haikou 570228,China;Hainan Holdings Special Glass Technology Co.,Ltd.,Chengmai 571900,China)
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2024年第5期764-772,共9页
Journal of Materials Science and Engineering
基金
海南省重大科技计划项目(ZDKJ2021043)
国家自然科学基金联合基金项目(U22A20124)。
