摘要
采用等离子体增强化学气相沉积复合磁控溅射法制备了WC/a-C:H薄膜.使用X射线衍射仪、扫描电镜、X射线光电子能谱、拉曼光谱和透射电镜表征了薄膜结构和组成,并使用球盘往复摩擦试验机测试薄膜在不同体系乳化液环境中的摩擦学性能.结果表明:WC/a-C:H薄膜具有典型的类金刚石结构,WC以β-WC1-x相的形式存在. WC在碳基薄膜中的掺杂使WC/a-C:H薄膜的硬度和弹性模量分别变化至11和140 GPa.油膜、水膜与转移膜的协同润滑效应能够提升其耐磨能力.适宜的浓度配比和薄膜表面石墨化程度是影响摩擦的关键因素.
The WC/a-C：H film was prepared by plasma-enhanced chemical vapor deposition combined magnetron sputtering. The structure and composition of the film were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, Raman spectroscopy and transmission electron microscopy. The tribological properties of the WC/a-C：H film in different emulsion systems were tested using a reciprocating friction tester.The results show that the WC/a-C： H film had a typical diamond-like structure and the WC was in the form of β-WC1-X phase. The WC/a-C：H film preferentially grew on the（200） plane. The doping of WC in the carbon-based film changed the hardness and elastic modulus of the WC/a-C：H film to 11 and 140 GPa, respectively. Collaborative lubrication can enhance its wear resistance. The appropriate ratio and graphitization were the key factor affecting the friction.
作者
孙尚琪
王永欣
路小江
刘翔
李金龙
王立平
SUN Shangqi;WANG Yongxin;LU Xiaojiang;LIU Xiang;LI Jinlong;WANG Liping(Key Laboratory of Marine Materials and Related Technologies of Chinese Academy of Sciences,Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo Institute of Materials Technology and Engineering of Chinese Academy of Sciences,Zhejiang Ningbo 315201,China;School of Materials Science and Engineering,Kunming University of Science and Technology,Yunnan Kunming 650093,China;Ningbo Zhongyi Hydraulic Motor Co,Ltd,Zhejiang Ningbo 315200,China)
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2018年第5期554-561,共8页
Tribology
基金
中国科学院战略性先导科技专项(A类)(XDA13040602)
国家自然科学基金项目(51475449)
国家973计划项目子课题(2014CB643302)
宁波市工业重大科技专项(2017B10004)资助
