摘要
采用射频磁控溅射技术在玻璃基底和单晶硅片上制备了无氢DLC薄膜。采用多种技术手段表征了不同工艺参数下制备的DLC薄膜的结构及光学性能。结果表明,溅射功率、工作气压、基底温度和氩气流量的变化对薄膜结构、透过率和光学带隙有较大影响。薄膜内部sp^3键含量、可见光透过率及光学带隙都随溅射功率或基底温度的增加而减小,随工作气压的增大而增加,随氩气流量的增加先增大后减小。在工作气压为2.0Pa时,可制备出I_D/I_G为0.86、可见光区平均透过率为85%、光学带隙为1.68eV的DLC薄膜。
Hydrogen-free Diamond-like carbon(DLC) thin films were deposited on glass and Si(100) substrates by Radio Frequency(RF) magnetron sputtering. The structure and optical properties of DLC films obtianed under various processing conditions were firstly characterized by several methods including Raman spectroscopy, X-ray photoelectron spectrometer(XPS) and etc. The results showed that the process parameters, such as sputtering power, pressure, substrate temperature, and argon flow rate, exhibit strong influences on the film structure, transmittance and band gap. The sp^3 component, transmittance and optical band gap all decreases with increasing sputtering power or substrate temperature, while increases with working pressure. With the increase of argon flow rate these properties go up first then fall down when the argon flow rate keep increasing. The DLC film with ID/IG of 0.86, average visible transmittance of 85% and optical band gap of 1.68 eV was prepared at working pressure of 2.0 Pa.
作者
冯建
姜宏
马艳平
张振华
那聪
FENG Jian;JIANG Hong;MA Yanping;ZHANG Zhenhua;NA Cong;College of Materials and Chemical Engineering,Hainan University;State Key Laboratory of Marine Resource Utilization in South China Sea;Special Glass Laboratory of Hainan Province;AVIC Hainan Special Glass Science and Technology Co.Ltd.(College of Materials and Chemical Engineering,Hainan University,Haikou 570228,China;State Key Laboratory of Marine Resource Utilization in South China Sea,Haikou 570228,China;Special Glass Laboratory of Hainan Province,Haikou 570228,China;AVIC Hainan Special Glass Science and Technology Co.Ltd.,Chengmai 571924,China)
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2019年第1期40-46,75,共8页
Journal of Materials Science and Engineering
基金
国家自然科学基金资助项目(51562008)
国家重点研发计划资助项目(2016YFC0700804)
海南省重点研发计划资助项目(ZDYF2016017)
关键词
类金刚石薄膜
磁控溅射
透过率
拉曼光谱
diamond-like carbon film
RF-magnetron sputtering
transmittance
Raman spectrum
