摘要
扫描探针光刻技术可实现10 nm以下的材料加工,为微纳加工技术带来新的发展方向。但在该技术中针尖与样品间热量传递是影响材料温升和加工效果的关键因素。本文设计了一种金纳米针尖阵列支撑的单层石墨烯结构,在真空条件下,针尖与石墨烯间接触热阻是影响结构温升的主要因素。首先评估金纳米针尖阵列在532 nm激光作用下近场增强因子约为3.2,其次,结合实验和仿真,测定金纳米针尖阵列与石墨烯间接触热阻约为4.6×10^(-5)(m^(2)·K)/W。
Scanning probe lithography enables the processing of materials below 10 nm,bringing a new development direction for micro/nano processing technology.However,the heat transfer between the nanotip and the sample is a key factor affecting the temperature rise of the material and the processing effect.In this paper,a gold nanotip array-supported monolayer graphene structure is designed,and the thermal contact resistance between the tip and graphene is the main factor affecting the temperature rise of the structure under vacuum conditions.Firstly,the near-field enhancement factor of the gold nanopin-tip array under the 532 nm laser is evaluated to be about 3.2,and secondly,combined Raman experiments and simulation,the thermal contact resistance between the gold nanotip and graphene is determined to be∼4.6×10^(-5)(m^(2)·K)/W/W.
作者
徐屾
邓书港
黄小娜
黄德钊
岳亚楠
XU Shen;DENG Shugang;HUANG Xiaona;HUANG Dezhao;YUE Yanan(Wuhan University,School of Power and Mechanical Engineering,Wuhan 430072,China;Shanghai University of Engineering Science,School of Mechanical and Automotive School,Shanghai 201620,China)
出处
《工程热物理学报》
EI
CAS
CSCD
北大核心
2024年第10期3131-3136,共6页
Journal of Engineering Thermophysics
基金
国家重点研发计划(No.2019YFE0119900)
国家自然科学基金项目(No.52076156,No.52106220)。
关键词
界面接触热阻
纳米针尖
拉曼光谱
近场增强
扫描探针光刻技术
interfacial thermal contact resistance
nanotip
Raman spectroscopy
near-field enhancement
scanning probe lithography
