摘要
As a promising micro/nanofabrication method,electrical-assisted nanomachining has obtained substantial attention due to its high material removal rate and attainable superior surface quality.In this study,a rectangular wave electrical signal was applied for nanomachining by a customized tungsten tip.Owing to the coupling effect between the electric field and mechanical force,the cutting depth of the machined grooves can be expanded.In electrical-assisted groove processing,a depth of 270 nm and an aspect ratio of 0.6 on the copper sample can be achieved.The influence of operation parameters including applied voltage,frequency,duty ratio,normal force and cutting speed on the machining performance was investigated in terms of the groove depth,width,aspect ratio,and surface roughness.The potential machining mechanisms should be a combination of electric field force,nanoscale electric discharge,electric contact thermal effects,possible annealing behavior,and scraping and plowing actions induced by mechanical forces.
基金
financial support from National Natural Science Foundation of China(52075364,52205506)
the Project of State Key Laboratory of Precision Manufacturing for Extreme Service Performance,Central South University(ZZYJKT2023-09)
the Guangdong International Cooperation Program of Science and Technology(2022A0505050078)
the Open Fund of State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology(JMDZ2021001).
