摘要
针对目前光刻机、超精密数控机床等高端超精密装备对于精准平面定位的要求,提出了一种基于多频磁场耦合的平面二维位移传感器。传感器组成为定尺和动尺,其中定尺由导磁基体和X、Y方向励磁线圈构成,动尺由导磁基体和X、Y方向感应线圈构成。通过对X、Y方向励磁线圈通入正余弦励磁信号,在定尺上构建出多频磁场耦合的二维均匀磁场阵列,动尺感应出带有位移信息的电信号,经过理论推导和电磁仿真验证了多频磁场直接解耦差动结构和幅值调制解算方法的可行性,并对仿真误差进行分析,并优化了传感器结构。最后采用PCB工艺制作传感器样机并开展相关实验研究,实验结果表明:传感器在150 mm×150 mm的测量范围可对二维位移进行精确测量,其中X方向测量精度为±33.08μm,Y方向测量精度为±36.95μm,优化后的传感器样机X、Y方向原始对极内位移误差峰峰值在原有基础上降低了49.1%和50.7%。
To meet the requirement of high-end ultra-precision equipment,such as photolithography machines and ultra-precision CNC machine tools for precise plane positioning,a planar two-dimensional displacement sensor based on multi-frequency magnetic field coupling is proposed.The sensor consists of a fixed length and a moving ruler.The fixed length is composed of a magnetically conductive substrate and an excitation coil in X-and Y-directions,and the moving ruler is composed of a magnetically conductive substrate and an induction coil in X-and Y-directions.By passing sine and cosine excitation signals to the excitation coils in X-and Y-direction,a two-dimensional uniform magnetic field array with multi-frequency magnetic field coupling is established on the fixed scale,and an electrical signal with displacement information is induced by the moving ruler.The feasibility of the multi-frequency magnetic field direct decoupling differential structure and amplitude modulation solution methods are evaluated through theoretical derivation and electromagnetic simulation.The simulation error is analyzed,and the sensor structure is optimized.Finally,the sensor prototype is manufactured by the PCB process and related experimental research is carried out.The experimental results show that the sensor can accurately measure the two-dimensional displacement in the measuring range of 150 mm×150 mm.The measurement accuracy of the X-direction is±33.08μm and the measurement accuracy in the Y-direction is±36.95μm.The peak-to-peak values of the original internal displacement errors in the X and Y directions of the optimized sensor prototype are reduced by 49.1%and 50.7%on the original basis.
作者
杨继森
庹万章
张静
冯济琴
卢渝
Yang Jisen;Tuo Wanzhang;Zhang Jing;Feng Jiqin;Lu Yu(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Key Laboratory of Advanced Manufacturing Technology for Automobile Parts,Ministry of Education,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China;School of Electrical and Electronic Engineering,Chongqing University of Technology,Chongqing 400054,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2024年第2期201-213,共13页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(52175454)
重庆市自然科学基金面上项目(CSTB2023NSCQ-MSX0382,cstc2021jcyj-msxmX0512)
重庆市教委科学技术研究计划重点项目(KJZD-K202301106)
重庆理工大学研究生教育高质量发展行动计划资助成果(gzlcx20232136)资助。
关键词
二维位移传感器
平面二维位移测量
多频磁场耦合
two-dimensional displacement sensor
planar two-dimensional displacement measurement
multi-frequency magnetic field coupling
