摘要
微位移测量已经广泛应用于精密测量领域中,实现微位移测量最关键的环节在于精确的定位和精细的运动。文章设计了一种基于应变方式进行二维微位移(纳米级)测量的系统,详细阐述了该系统主要组成部分:微位移检测传感器、处理电路及相关系统软件。实验结果表明该系统可以满足二维微(纳米级)测量的要求。
Micro-displacement measurement has already been applied in the accurate measurement field extensively and the key of it lies in the accurate localization and movement. The design of a measurement system based on strain gauge for two-dimensional micro-displacement is introduced. The components which include micro-displacement measurement sensor, circuits and software are represented. The experiment result shows that it can be utilized to measure two-dimensional micro-displacement on micron or nanometer level.
出处
《传感技术学报》
CAS
CSCD
北大核心
2005年第4期739-741,744,共4页
Chinese Journal of Sensors and Actuators
关键词
微位移
应变式
微处理器
micro-displacement
strain gauge
MCU
