摘要
采用真空感应炉制备不同Ce含量AlMn-Ce合金靶材。利用X射线衍射仪、GSAS软件、扫描电镜、能谱仪、万能力学试验机和布氏硬度仪分析靶材物相组成、含量、分布规律及合金塑韧性。同时选用Al_(85)Mn_(15)-10%Ce(质量分数)合金靶材进行镀膜试验,利用X射线衍射仪和动电位极化曲线测试涂层相结构和耐腐蚀性能。结果表明:未添加Ce的Al_(85)Mn_(15)合金中Al-Mn化合物形成粗大树枝晶组织,硬度高,脆性大,镀膜过程靶面开裂,无法使用;加入Ce后,Ce与Al,Mn优先化合形成Al_(10)CeMn_(2)初生相,能够有效制约Al-Mn化合物粗化生长,改善组织均匀性。Ce含量为10%时,合金压缩应变率达2.05%,塑韧性最好,镀膜过程靶面完整;进一步增加Ce含量(20%以上),过多的Ce与Al化合形成板条状Al_(11)Ce_(3)初生相,靶材塑韧性下降。Al_(85)Mn_(15)-10%Ce靶材镀膜后形成非晶涂层,自腐蚀电位为-0.49V,自腐蚀电流密度为5.1×10^(-8)A·cm^(-2),表现出良好的耐腐蚀性能。Ce添加能够改善Al_(85)Mn_(15)合金脆性,确保靶材磁控溅射镀膜使用要求;同时有助于促使Al-Mn基涂层在相对较低Mn(Mn=15%(原子分数))含量条件下形成非晶结构,提升涂层耐蚀性能。
AlMn-Ce alloy targets with different rare earth Ce contents were prepared by vacuum induction fur-nace.X-ray diffraction,GSAS,scanning electron microscope,energy dispersive spectrometer,universal testing machine and brinell hardness measurements were used to analyze the phase composition,phase distribution and alloy plasticity and toughness of the target.At the same time,the Al_(85)Mn_(15)-10%Ce alloy target was selected for the coating test,and the phase structure and corrosion resistance of the coating were tested by grazing incidence X-ray diffraction and potentiodynamic polarization curve.The results show that the Al-Mn compound in the Al_(85)Mn_(15)alloy without Ce addition formed a coarse dendritic structure with high hardness and brittleness,and the target surface was cracked during the coating process,making it unusable;after adding Ce,the Ce element is preferentially combined with Al and Mn elements to form the primary phase of Al_(11)CeMn_(3)which can effectively restrict the growth of the Al-Mn compound and improve the uniformity of the structure.When the Ce content is 10%,the compressive strain rate of the alloy reaches 2.05%,the plasticity and toughness are the best,and the target is complete during the coating process;if the Ce content is further increased(above 20%),too much Ce elements combine with Al to form a lath-shaped Al_(11)Ce_(3);primary phase which reduces the ductility and toughness of the target.The Al_(85)Mn_(15)-10%Ce target was coated to form an amorphous coating with a self-corrosion potential of-0.49 V and a self-corrosion current density of 5.1×10^(-8)A·cm^(-2),showing good corrosion resistance.Ce addition improves the brittleness of AlgsMnis alloy and ensures the application requirements of magnetron sputtering;at the same time,it helps to promote the formation of amorphous structure in Al-Mn based coating under the condition of relatively low Mn(Mn=15%)content,improving the corrosion resistance of the coating.
作者
鲁飞
刘树峰
许亿
李慧
张帅
温永清
Lu Fei;Liu Shufeng;Xu Yi;Li Hui;Zhang Shuai;Wen Yongqing(State Key Laboratory Baiyunobo Rare Earth Resource Researches and Comprehensive Utilization,Baotou Research Institute of Rare Earths,National Engineering Research Centre of Rare Earth Metallurgy and Functional Materials,Baotou 014030,China;Institute of Mechanics,Chinese Academy of Sciences,Beijing 100190,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《中国稀土学报》
EI
CAS
CSCD
北大核心
2024年第2期330-338,I0005,共10页
Journal of the Chinese Society of Rare Earths
基金
内蒙古自治区自然基金资助项目(2020MS0515),国家重点研发计划资助项目(2021YFB3500100)资助。
关键词
AlMn-Ce
合金靶材
塑韧性
非晶
耐蚀性
AlMn-Ce
alloy target
plastic toughness
amorphous
corrosion resistance
