摘要
在钕铁硼(Nd Fe B)磁体表面利用磁控溅射沉积不同锰含量的铝锰合金薄膜。磁控溅射制备的铝锰合金薄膜表面光滑致密。薄膜结构受到锰含量的影响,当薄膜锰含量从6.80at%上升到25.78at%时,薄膜结构由晶态逐渐转变为非晶态,达到35.67at%时,薄膜中析出金属间化合物Al_8Mn_5。铝锰合金薄膜的耐腐蚀性能受薄膜成分变化的影响很大,当薄膜中锰含量达到25.78%时,此时薄膜呈非晶态结构,薄膜的自腐蚀电流密度达到1.198×10^(-7)A/cm^2,比钕铁硼基体降低了2个数量级,耐腐蚀性能最好。
Al-Mn film of different manganese content was deposited on NdFeB magnets by means of magnetron sputtering. The results show that the surface of the Al-Mn film is compact and smooth,and its structure is influenced by the manganese content,when the manganese content in the film increases from 6. 8at% to 25. 78at%,the film structure gradually changes from crystalline to amorphous. When the Mn content reaches 35. 67at%,the intermetallic compound Al_8Mn_5 is separated out from the film. Corrosion resistance of the Al-Mn film is greatly affected by component of the film,when the manganese content in the film reaches 25. 78at%,the structure of the film becomes amorphous,and its corrosion current density reaches 1. 198 × 10^-7A/cm^2 which is lower two orders of magnitude than that of the NdFeB magnets matrix,and its corrosion resistance is preferable.
出处
《金属热处理》
CAS
CSCD
北大核心
2017年第8期15-19,共5页
Heat Treatment of Metals
关键词
磁控溅射
钕铁硼磁体
铝锰合金薄膜
耐蚀性
magnetron sputtering
Nd Fe B magnets
Al-Mn alloy film
corrosion resistance
