摘要
本文以亲碳元素组成的TiZrNbTaMo高熵合金作为基材,通过化学气相沉积的方法在其表面沉积金刚石膜。结果表明:金刚石能够在TiZrNbTaMo高熵合金表面快速形核,形核密度高达7.53×109cm^(-2),且在30 min内形成连续的金刚石膜;金刚石在TiZrNbTaMo高熵合金表面的形核密度及生长速率远高于在组成高熵合金的单质金属表面的形核密度及生长速率。这是由于在金刚石形核及生长初期,高熵合金表面能够快速形成混合碳化物层,阻碍碳原子向合金基材扩散,使其富集在碳化物层表面,促进金刚石的形核和生长。沉积金刚石后的Ti ZrNbTaMo高熵合金在3.5%(质量分数)NaCl溶液中的抗腐蚀能力显著提升。本文结果为金属材料表面高效率沉积高形核密度的金刚石以及改善高熵合金表面硬度和耐腐蚀性能提供了新的思路和方法。
In this paper,using TiZrNbTaMo high entropy alloy(HEA)composed of carbonophilic elements as the substrate,the diamond film was deposited on its surface by chemical vapor deposition(CVD).The results show that the diamond on the surface of TiZrNbTaMo HEA can nucleate rapidly,and the nucleation density of diamond is as much as 7.53×109 cm-2,and a continuous diamond film can form within 30 min,which is much higher than that on constituted metals.This is because the mixed carbide layer forms on the surface of HEA at the beginning of diamond nucleation and growth,which will hinder the diffusion of carbon atoms and lead to stacked-carbon on the surface.It is favorable for nucleation and growth of diamond.The corrosion resistance of TiZrNbTaMo HEA in 3.5%NaCl(mass fraction)solution is significantly improved after diamond deposition.Current results provide a novel idea and method for efficient deposition of diamond with high nucleation density on the surface of metals for the improvement of surface hardness and corrosion resistance of HEA.
作者
韩昌幸
王永胜
周兵
贺志勇
于盛旺
HAN Chang-xing;WANG Yong-sheng;ZHOU Bing;HE Zhi-yong;YU Sheng-wang(College of Materials Science and Engineering,Taiyuan University of Technology,Taiyuan 030024,China.)
出处
《中国有色金属学报》
EI
CAS
CSCD
北大核心
2023年第10期3289-3298,共10页
The Chinese Journal of Nonferrous Metals
基金
国家重点研发计划资助项目(2022YFE0123000)
山西省科技成果转化与培育项目(2020CG011)
山西省科技重大项目(20181102013)
山西省“1331工程”工程研究中心资助项目(PT201801)
山西省自然科学基金资助项目(20210302123162)。
关键词
金刚石膜
高熵合金
化学气相沉积
形核
碳化物
diamond film
high entropy alloy
chemical vapor deposition
nucleation
carbides
