摘要
针对激光在机测量工件特征时的测量精度问题,对测量系统的关键误差影响因素及补偿应用进行了研究。使用激光位移传感器作为测量工具对工件特征进行在机测量时,测量结果受激光位移传感器倾斜误差和数控机床几何误差影响。为了校正激光位移传感器在物面倾斜时引起的测量误差,设计了倾斜误差试验,利用勒让德多项式对倾斜误差进行了建模和补偿,补偿后倾斜误差可减小至±0.025 mm以内。针对不动式激光在机测量时数控机床线性轴几何误差对测量结果的影响,设计了球杆仪倾斜安装试验,利用参数化建模的方式对X轴和Y轴的几何误差进行了解耦。最后根据建立的倾斜误差与几何误差模型,对工件特征的在机测量结果进行了补偿。结果表明,对工件特征在机测量结果进行误差补偿后,线性尺寸测量误差小于0.05 mm,角度测量误差小于0.08°,相较于补偿前在机测量精度明显提高。
Aiming at the measurement accuracy of laser on-machine measurement of workpiece features,the key error influencing factors and compensation applications of the measurement system are studied.When using the laser displacement sensor as a tool to measure the workpiece features on-machine,the measurement results are affected by the tilt error of the laser displacement sensor and the geometric error of the CNC machine tool.To correct the measurement error caused by the laser displacement sensor when the object surface is tilted,a tilt error experiment is designed,and the Legendre polynomial is used to model and compensate for the tilt error.After compensation,the tilt error can be reduced to within±0.025 mm.Aiming at the influence of the geometric error of the linear axis of the CNC machine tool on the measurement results during the stationary laser onmachine measurement,a tilting installation experiment of the Double ball bar(DBB)is designed,and the geometric errors of the X-axis and the Y-axis are decoupled using parametric modeling.Finally,according to the established tilt error and geometric error models,the on-machine measurement results of workpiece features are compensated.The results show that after the error compensation of the workpiece feature on-machine measurement results,the linear dimension measurement error is less than 0.05 mm,and the angle measurement error is less than 0.08°,which is significantly improved compared to the on-machine measurement accuracy before compensation.
作者
蒋晓耕
杨肖
孟祥冬
高端
王浩
Jiang Xiaogeng;Yang Xiao;Meng Xiangdong;Gao Duan;Wang Hao(Tianjin Key Laboratory of Advanced mechatronics Equipment Technology,Tianjin 300387,China;School of Mechanical Engineering,Tiangong University,Tianjin 300387,China)
出处
《应用激光》
CSCD
北大核心
2023年第10期179-187,共9页
Applied Laser
基金
国家自然科学基金青年项目(51905377)
天津市自然科学基金青年项目(20JCQNJC00040)。
关键词
工件特征
在机测量
激光位移传感器
测量误差
误差补偿
workpiece feature
on-machine measurement
laser displacement sensor
measurementerror
errorcompensation
