摘要
SE激光选择性电极在制程中易对电池电极重掺区造成表面损伤,为防止后续工艺对其造成进一步的腐蚀,在硅表沉积一层氧化膜来达到保护效果。本文通过热氧与臭氧两种工艺制备氧化膜,并通过碱抛后损伤区的微观形貌以及电池电性能对比,得出热氧制氧化膜的致密性好,对损伤区可以起到较好的保护效果,保证了金属电极与硅基体低的串联电阻,电性能优越。
SE laser selective electrode is easy to cause surface damage to the heavily doped area of the battery electrode during the manufacturing process.In order to prevent further corrosion caused by the subsequent process,a layer of oxide film is deposited on the silicon surface to achieve the protection effect.In this paper,the oxide film is prepared by two processes of hot oxygen and ozone,and through the comparison of the micro-morphology of the damaged area and the electrical performance of the battery after alkali polishing,it is concluded that the hot oxygen oxide film has good compactness,can play a good protective effect on the damaged area,and ensures the low series resistance between the metal electrode and the silicon substrate,and has excellent electrical performance.
作者
李雪方
韩超
申开愉
Li Xuefang;Han Chao;Shen Kaiyu(Shanxi Lu'an Solar Energy Technology Co.,Ltd.,Changzhi Shanxi 046000)
出处
《山西化工》
2023年第1期19-20,26,共3页
Shanxi Chemical Industry
关键词
激光掺杂
二氧化硅
热氧
臭氧
laser doping
silicon dioxide
hot oxygen
ozone
