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ZnO压电薄膜制备及压电仿真特性分析

Preparation of ZnO Piezoelectric Thin Films and Analysis of Piezoelectric Simulation Characteristics
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摘要 压电能量收集是近年来研究的热点话题,为了优化ZnO压电薄膜结构,提高其输出电压值,采用磁控溅射法进行制备并对其晶向结构进行表征。同时,利用有限元软件ANSYS分析ZnO压电微悬臂梁结构尺寸变化对输出电压的影响并得出振动频率、加速度激励与输出电压之间的关系。结果表明,制备的ZnO纳米薄膜表面成型质量较好,具有衍射峰(002)择优取向方向生长。增大振子长度、减小宽度及选取适合的厚度能够提高输出电压。当加速度2.5 g,频率500 Hz下输出电压最大为0.589 V。 Piezoelectric energy harvesting is a hot topic of research in recent years.In order to optimize the structure of ZnO piezoelectric thin films and improve its output voltage value,the magnetron sputtering method is used to prepare and characterize its crystallographic structure.At the same time,the finite element software ANSYS is used to analyze the influence of ZnO piezoelectric micro-cantilever structure size change on the output voltage and the relationship between vibration frequency,acceleration excitation and output voltage.The results show that the surface forming quality of the prepared ZnO nanofilm is good,and the diffraction peak(002)grows in the preferred orientation direction.Increasing the length of vibrator,reducing the width and suitable thickness can improve the output voltage.When the acceleration is 2.5g and the frequency is 500Hz,the maximum output voltage is 0.589V.
作者 孙莹盈 史春景 刘双杰 郝永平 SUN Ying-ying;SHI Chun-jing;LIU Shuang-jie;HAO Yong-ping(School of Mechanical Engineering,Shenyang Ligong University,Shenyang Liaoning 110159,China;School of Equipment Engineering,Shenyang Ligong University,Shenyang Liaoning 110159,China)
出处 《机械研究与应用》 2023年第1期122-126,共5页 Mechanical Research & Application
关键词 压电 氧化锌 磁控溅射 能量收集 piezoelectricity zinc oxide magnetron sputtering energy collection
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