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磁控溅射制备不同光吸收涂层的效能对比研究

Comparative study on the efficiency of preparing different light absorption coatings by magnetron sputtering
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摘要 设计适宜的光吸收涂层并制备相应的吸收膜是实现高效利用太阳能的重要手段。文章依据光吸收涂层的设计理论,应用磁控溅射的方法制备了两种代表性的膜系——双层膜和六层膜,并通过两类膜系的光吸收实验,比较了两种膜层的效能,应用X射线衍射和原子力显微镜从微观结构解释了双层膜吸收性能与膜组成的关系。结果表明:以Cu膜为红外反射膜的双层膜系,膜层的厚度与吸收率成反比,制备膜层反射率最低的溅射时间为5 s;与双层膜相比,六层膜由于不同膜层的相互补充作用,具备更好的吸收率和更低的反射率,在波长为500~2000 nm时,六层膜样品的反射率为3%~5%。 Designing appropriate light absorbing coatings and preparing corresponding absorbing films is an important means to realize the efficient utilization of solar energy.Based on the design theory of light absorbing coating,this paper prepares two representative film systems by magnetron sputtering,double-layer film and six-layer film.Through the light absorption experiments of the two kinds of films,this paper compares their efficiency and explains the relationship between the absorbability of the double-layer film and its composition from the microstructure by X-ray diffraction and atomic force microscope.The results show that the thickness of the double-layer film system with Cu film as infrared reflection film is inversely proportional to the absorptivity,and the sputtering time with the lowest reflectivity is 5 sec.Compared with the double-layer film,the six-layer film has better absorptivity and lower reflectivity due to the complementary effect of different layers.When the wavelength is 500-2000 nm,the reflectivity of the six-layer film sample is 3%-5%.
作者 李方军 李灵婕 成文清 田淑英 任会学 LI Fangjun;LI Lingjie;CHENG Wenqing;TIAN Shuying;REN Huixue(Shandong Sanqi Energy Co.,Ltd.,Jinan 250220,China;School of Municipal and Environmental Engineering,Shandong Jianzhu University,Jinan 250101,China;Penglai Dengzhou Sub-district Office Emergency Management Office,Yantai,265600,China)
出处 《山东建筑大学学报》 2022年第6期83-89,共7页 Journal of Shandong Jianzhu University
基金 山东省重大科技创新项目(2019JZZY020211)。
关键词 光吸收涂层 膜系 光热转换 磁控溅射 对比研究 light absorbing coating film system photothermal conversion magnetron sputtering comparative study
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