摘要
四氟化碳(CF_(4))是微电子行业中用量最大的等离子蚀刻气体之一。在电子级CF_(4)的制备工艺流程中,精馏提纯技术是CF_(4)气体纯度能否达到电子级的关键所在。目前,本公司自主研发的电子级四氟化碳系统制备技术已实现工业化量产,但精馏提纯过程存在能耗较高,效率和收率较低等问题。针对以上问题,本项目设计开发了一款由冷凝器、再沸器和精馏塔三合一构成的不带捕集器的整体式精馏装置,采用多级液相分布精馏技术结合优化工艺操作参数,取得良好提纯效果,实现了节能、高效。
Carbon tetrafluoride(CF_(4)) is one of the most used plasma etching gases in the microelectronics industry. In the preparation process of electronic grade CF_(4)4, distillation and purification technology is the key to whether the gas purity of CF_(4) can reach electronic grade standard.At present, the electronic grade carbon tetrafluoride system preparation technology independently developed by our company has realized industrial mass production, but the process of distillation and purification has high energy consumption, low efficiency and low yield problems. In view of the above problems, this project designed and developed a three-in-one distillation device without catcher, which composed of condenser, reboiler and distillation column. Through the multistage liquid phase distribution distillation technology combined with the optimization of process parameters,this device has obtained good purification effect, and has realized energy-saving and high efficiency.
作者
阙祥育
Que Xiangyu(Fujian Deer Technology Co.,Ltd.,Fujian,364204)
出处
《当代化工研究》
2022年第24期137-139,共3页
Modern Chemical Research
关键词
四氟化碳
精馏
提纯
高效
节能
分离
carbon tetrafluoride
distillation
purification
efficient
energy-saving
separation
