摘要
涡轮分子泵广泛应用于半导体与薄膜工业、核物理及表面科学等领域,是获得超高真空环境的核心机械设备。本文从一体成型的涡轮转子的可加工性出发,提出了一种涡轮叶片的结构改进方案,并分别使用二维模型和三维模型对改进前后的结构进行性能评估:在相同几何结构下,二维模型计算单级涡轮叶列的何氏系数略高于三维模型,压缩比略低于三维模型。同时,改进模型在解决涡轮叶片叶根可加工性的同时,其最大何氏系数和最大压缩比均有一定程度的提升。
Turbomolecular pump is widely used in the semiconductor and thin film industry,nuclear physics,and surface science.It is the core mechanical equipment to obtain an ultra-high vacuum environment.Based on the machinability of the integrally formed turbine rotor,this paper proposes a structural improvement scheme for the turbine blade and uses the two-dimensional model and the three-dimensional model to evaluate the performance of the improved structure:under the same geometric structure,the ho coefficient of the two-dimensional model is slightly higher than that of the three-dimensional model,and the compression ratio is slightly lower than that of the three-dimensional model.The improved model not only solves the machinability of the turbine blade root,but also improves its maximum ho coefficient and maximum compression ratio to a certain extent.
作者
匡永麟
王晓冬
张国玉
张鹏飞
杜志华
KUANG Yonglin;WANG Xiaodong;ZHANG Guoyu;ZHANG Pengfei;DU Zhihua(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2022年第10期731-736,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家重大科学仪器设备开发专项项目(2013YQ130429)。
关键词
涡轮分子泵
曲面叶片
抽气性能
结构设计
数值计算
Turbomolecular pump
Curved blade
Pumping performance
Structural design
Numerical calculation
