摘要
针对小型涡轮分子泵对涡轮叶片的精准设计提出的更高要求,从入射方向分布和入射位置分布的角度,对比分析了传统单级叶列算法和多级动静组合叶列算法之间的差异,发现传统单叶列算法存在一定的原理性误差。以1~4级组合叶列为例,采用不同模拟算法分别对传输概率、最大何氏系数和最大压缩比进行比较研究,与多级动静组合叶列算法相比,采用传统单级叶列算法对涡轮叶列的抽气性能的计算值偏大10%左右。提出的基于动静叶列多级组合算法,是对传统算法的继承和发展,为涡轮分子泵的精准设计提供了一种新的理论计算方法。
Due to the higher requirements for the precision design of turbine blades in small turbo molecular pumps,the difference between traditional single-stage row algorithm and multi-stage rotor-stator combined rows algorithm are compared and analyzed from the perspective of incident direction and position distribution.It shows that there are some principle error in the traditional single-stage row algorithm.Taking the 1st to 4th combined rows as an example,different simulation algorithms are used to compare the transmission probability,the maximum He’s coefficient and the maximum compression ratio.Compared with the multi-stage rows algorithm,the traditional single-stage row algorithm is used to calculate the pumping performance of the turbine rows by about 10%larger.The multi-stage combined algorithm based on rotor-stator rows proposed is the inheritance and development of traditional algorithms,and provides a new theoretical calculation method for the precise design of turbo molecular pumps.
作者
孙坤
张世伟
韩峰
赵凡
张志军
韩进
SUN Kun;ZHANG Shiwei;HAN Feng;ZHAO Fan;ZHANG Zhijun;HAN Jin(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China)
出处
《真空与低温》
2020年第1期82-86,共5页
Vacuum and Cryogenics
关键词
涡轮分子泵
多级组合叶列
算法
传输概率
比较研究
turbo molecular pump
multi-stage combined rows
algorithm
transmission probability
comparative study
