摘要
本文介绍了一种超高真空大抽速复合分子泵的研制,该型分子泵转子采用了涡轮叶片与螺旋槽式牵引级的复合结构,由整体加工而成。文中重点介绍了复合转子的设计及优化,并对定片隔环一体型结构与复合底盘结构的设计以及改进进行简要介绍。该型复合分子泵的抽速比同口径涡轮分子泵高10%左右,同时具有更高的压缩比与抗前级压力,可以在100Pa的真空压力下启动,排气端不需要匹配较大的前级泵就可满足抽气要求。该型分子泵动平衡性较好,结构简单,集成性较高,整机的制造成本相对涡轮分子泵更低。
This paper introduces the development of a kind of compound molecular pump with ultra-high vacuum and large pumping speed.The rotor of the molecular pump adopts the composite structure of turbine blade and spiral groove traction stage,which is manufactured by integral processing. It focuses on the design and optimization of the composite rotor, and briefly introduces the design and improvement of the integral structure of the stator and spacer ring and the composite chassis structure.The pumping speed of the composite molecular pump is about 10% higher than that of the same diameter turbo molecular pump.At the same time, it has higher compression ratio and resistance to the front stage pressure. It can be started under the vacuum pressure of 100 Pa. The exhaust end does not need to match a larger front stage pump to meet the pumping requirements. This type of molecular pump has better dynamic balance, simple structure and higher integration, and the manufacturing cost of the whole machine is lower than that of the turbo molecular pump.
作者
郁晋军
董欣
刘敏强
YU Jin-jun;DO Xin;LIU Min-qiang(Beijing Sihai Xiangyun Fluid Technology Co.,Ltd,Beijing,101100,China)
出处
《真空》
CAS
2021年第4期36-41,共6页
Vacuum
基金
国家重大科学仪器设备开发专项(编号:2012YQ040235)。
关键词
复合分子泵
整体转子
复合转子
大抽速
compound molecular pump
integral rotor
composite rotor
high pumping speed
