摘要
面向液体低流速测量应用需求,基于介质热传递工作原理,采用微电子机械系统(MEMS)加工技术制备了以玻璃为衬底的微纳热分布式流速传感器,加热和测温元件均采用铂电阻,传感器芯片尺寸仅为10 mm×10 mm,测温电阻与中心加热电阻的间距为0.8 mm,完成了芯片的封装及测试。通过实验测试,在室温条件下,传感器加热电阻为108.8Ω,测温电阻为525.2Ω,且测温电阻具有良好的温度-阻值线性度(R^(2)≥0.9999),传感器适用量程为0~90 mm/s,在极低流速0~20 mm/s范围测试,有较好的输出曲线关系,最高灵敏度达到0.06mV/(mm·s^(-1)),且有较好的稳定性能。传感器具有尺寸小、成本低、可批量制造,将为液体流速测量领域提供核心传感器。
Facing the application requirements of liquid low flow rate measurement,based on working principle of medium heat transfer,a micro-nano thermal distributed flow rate sensor with glass as the substrate is fabricated by using the micro-electromechanical system(MEMS)processing technology.The heating and temperature measuring elements are made of platinum resistance,the size of the sensor chip is only 10 mm×10 mm,the distance between the temperature measuring resistance and the central heating resistance is 0.8 mm,and the packaging and testing of the chip are completed.Through the experimental test,at room temperature,the heating resistance of the sensor is 108.8Ω,the temperature measuring resistance is 525.2Ω,the temperature measuring resistance has good temperature-resistance linearity(R^(2)≥0.9999),and the applicable range of the sensor is 0~90 mm/s,tested in the extremely low flow rate range of 0~20 mm/s,there is a good output curve relationship,the highest sensitivity reaches 0.06mV/(mm·s^(-1)),and the good stability performance.The sensor has a small size,low cost,and can be manufactured in batches,and will provide the core sensor for the field of liquid flow rate measurement.
作者
车啸婷
王振宇
管轶华
郜晚蕾
金庆辉
CHE Xiaoting;WANG Zhenyu;GUAN Yihua;GAO Wanlei;JIN Qinghui(Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第4期73-76,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(61871243)。
关键词
低流速测量
热分布式
微纳传感器
铂电阻阵列
low flow velocity measurement
thermal distribution
micro-nano sensors
Platinum resistance array
