摘要
设计并仿真了一种利用介质热传递原理工作的流速传感器,适用于低流速区域的海洋洋流/潜流流速测量。通过物理场仿真软件COMSOL对传感器进行了热-流体的耦合场模拟仿真分析,验证了设计传感器的可行性。采用微电子机械系统(MEMS)加工技术制备了以玻璃为衬底的微纳热分布型流速传感器,加热和测温电阻均采用铂电阻传感器。传感器芯片尺寸仅为10 mm×10 mm,测温电阻与中心加热电阻的间距分别为1和2 mm,完成了芯片的封装及测试。通过实验与分析得出流速和不同间距测温电阻的电压之间的变化关系曲线。两种不同测温电阻和中心加热电阻间距的传感器,可测量的最大流速分别为265和315 mm/s。
A flow velocity sensor operating by the principle of medium heat transfer was designed and simulated,which was suitable for measuring the velocity of ocean flow/underflow in lowvelocity areas.With the physical field simulation software COMSOL,the thermal-fluid coupling field simulation and analysis of the sensor was performed,and the feasibility of the designed sensor was verified.With glass as the substrate,the micro-electromechanical system(MEMS)processing technology was used to fabricate a micro-nano flow velocity sensor based on thermal distribution.The platinum resistance sensor was used in the heating and temperature measuring resistors.The sensor chip size is only 10 mm×10 mm.The distances between the temperature measuring resistor and the center heating resistor are 1 mm and 2 mm,respectively.The chip packaging and test were completed.The relationship curves of the flow velocity and voltage across the temperature measuring resistor with different distances were obtained through experiments and analysis.For two sensors with different distances between the temperature measuring resistor and the center heating resistor,the maximum measured flow velocities of the sensor are 265 mm/s and 315 mm/s,respectively.
作者
车啸婷
贾治森
王振宇
管轶华
郜晚蕾
金庆辉
Che Xiaoting;Jia Zhisen;Wang Zhenyu;Guan Yihua;Gao Wanlei;Jin Qinghui(Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315211,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academic of Sciences,Shanghai 200050,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第11期1005-1013,共9页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61871243)。
