摘要
利用激光改性方法研究了被广泛应用在微电子组件封装中的氮化铝(AlN)陶瓷基板在不同气体环境、激光功率、扫描间隔下的可加工性,通过试验测量了AlN试件表面硬度值和元素含量。试验结果表明:在N_(2)、Ar、O_(2)三种气体环境下,试件表面成分主要为AlN、Al和Al_(2)O_(3),且显微硬度计测得Ar环境下的熔覆层硬度最低,最有利于后续切削加工。在Ar环境下,随着激光功率的增大和扫描间隔的减小,AlN表面改性后的硬度减小,最小值可达到174.83HV,更易进行切削加工。
The machinability of AlN ceramic substrates widely used in the packaging of microelectronic components were studied by laser modification method under different gas environments,laser powers and scanning intervals.The surface hardnesses and element contents of AlN specimen were measured by tests.The testing results show that under N_(2),Ar,and O_(2) gas environments,the surface components of the specimen are mainly AlN,Al and Al2O3,and the hardness of the cladding layers measured by microhardness tester is the lowest under the Ar environment,which is most conducive to the subsequent cutting.Under the Ar environment,with the increase of laser power and the decrease of scanning interval,the hardnesses of AlN surface modification decrease,and the minimum value may reach 174.83HV,making it easier to perform cutting.
作者
陈妮
韦佳伟
张鑫磊
李亮
何宁
CHEN Ni;WEI Jiawei;ZHANG Xinlei;LI Liang;HE Ning(National Key Laboratory of Science and Technology on Helicopter Transmission,Nanjing University of Aeronautics and Astronautics,Nanjing,210016)
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2021年第23期2817-2822,共6页
China Mechanical Engineering
基金
国家自然科学基金(51905270,51975288)
江苏省自然科学基金(BK20180435)
南京航空航天大学“直升机传动技术重点实验室”开放课题(HTL-0-20G01)。
关键词
氮化铝
气体环境
激光功率
扫描间隔
激光改性
aluminum nitride(AlN)
gas environment
laser power
scanning interval
laser modification
