摘要
在芯片制造、智能制造、航空航天等领域,精密平面定位迫切需要平面两维度位移的同步独立精密测量。本文提出一种基于电磁感应原理的平面位移传感器,由动阵面和定阵面组成。定阵面由m×n个平面螺旋线圈阵列串联而成,通入交变励磁电信号时在测量平面产生平面驻波磁场。动阵面由四个螺旋线圈以2×2矩阵形式排列,感应出振幅随x轴和y轴位移变化的四路调制信号,并利用Cordic算法求解两维度位移量。本文首先介绍了传感器的工作原理,对电磁模型进行有限元分析,并对位移解算算法进行数值模拟。根据仿真结果对测量误差进行分析溯源,优化传感器结构。制作传感器样机开展了实验验证,验证了传感器结构和位移解耦方法的可行性。实验表明,传感器在节距内最大误差为48.7μm,分辨率为0.317μm,在147 mm×147 mm量程范围内,传感器线性度达到0.15%,为高精度电磁感应式平面二维位移传感器的进一步发展提供了理论支撑和实验指导。
In chip manufacturing,intelligent manufacturing,aerospace and other fields,precise plane positioning urgently needs synchronous independent precise measurement of two-dimensional displacement.In this article,a planar displacement sensor based on the principle of electromagnetic induction is proposed,which consists of a moving front and a fixed front.The fixed array includes m×n planar spiral coil arrays in series.The planar standing wave magnetic field array is generated on the measuring plane when 4 kHz AC current is applied.The moving front is arranged by four spiral coils in the form of 2×2 matrix,and four-channel modulation signals whose amplitude changes with the displacement of x axis and y axis are induced.The Cordic algorithm is used to solve the displacement of two dimensions.This article first introduces the structure and working principle of the sensor.The finite element analysis is implemented to the electromagnetic model,and numerical simulation is applied to the dislocation algorithm.According to simulation results,the measurement error is analyzed and traced,and the sensor structure is optimized.The sensor prototype is made and the experimental verification is carried out,which verifies the feasibility of the decoupling method of sensor structure and position shift.The maximum error of the sensor in the counter pole is 48.7μm.And the sensor resolution is 0.317μm.Experimental results show that the linearity of the sensor reaches 0.15%within the range of 147 mm×147 mm,which provides theoretical support and experimental guidance for the further development of the high-precision two-dimensional time-gate displacement sensor.
作者
武亮
王鑫达
童鹏
徐是
Wu Liang;Wang Xinda;Tong Peng;Xu Shi(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2021年第9期225-235,共11页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51827805,51875069)
重庆理工大学研究生创新项目(clgycx20202080)资助。
关键词
平面二维位移测量
螺旋线圈
平面驻波磁场
CORDIC算法
two-dimensional displacement measurement
spiral coil
planar standing wave magnetic field
Coordinate rotation digital computer algorithm
