摘要
基于半导体微纳工艺设计并制备了一种FeNHf磁性薄膜的镜像四环非对称太赫兹微结构,测试了薄膜磁性能和微结构太赫兹波传输特性。结果表明FeNHf薄膜在0.5GHz时在难轴方向的磁导率为410,共振频率为1.48GHz,磁各向异性场强度为31.88Oe(1A·m^(-1)=4π×10^(-3)Oe)。通过比较基于FeNHf薄膜的微结构与相同尺寸的非磁Au薄膜的微结构的太赫兹波传输特性,发现FeNHf薄膜四环微结构的共振频率比Au薄膜四环微结构的共振频率低,这主要是由于FeNHf薄膜具有较高的等效电感值。实验和模拟结果表明,FeNHf薄膜的电导率比Au薄膜低一个量级,在太赫兹共振频率下FeNHf薄膜微结构比Au薄膜微结构具有更高的电场强度和磁场强度,其太赫兹波涡流损耗约为Au薄膜微结构的25%,因此,FeNHf磁性薄膜的镜像四环非对称太赫兹微结构具有较大的透射率和Q值,能够更好地抑制太赫兹波的损耗。
A mirrored four-ring asymmetric terahertz microstructure based on the FeNHf mag-netic film was designed and prepared by using the semiconductor micro-nano process.The mag-netic properties of the film and terahertz wave transmission characteristics of the microstructure were tested.The results show that at 0.5 GHz,the permeability of the FeNHf film is 410 along the hard axis,and the resonance frequency and magnetic anisotropic field intensity of the FeNHf film are 1.48 GHz and 31.88 Oe(1 A·m^(-1)=4π×10^(-3)Oe),respectively.Terahertz transmis-sion characteristics of the FeNHf film-based and non-magnetic Au film-based microstructure with the same size were compared.It is found that due to the high equivalent inductance of the FeNHf film,the resonance frequency of the FeNHf film four-ring microstructures is lower than that of the Au film four-ring microstructure.The experimental and simulated results indicate that the conductivity of FeNHf film is one order of magnitude lower than that of the Au film,the FeNHf film microstructures have the higher electric field strength and magnetic field strength than those of the Au film microstructure at the terahertz resonance frequency,the terahertz wave eddy cur-rent loss of the FeNHf film microstructure is about 25%of that of Au film microstructure.Therefore,the mirrored four-ring asymmetric terahertz microstructure based on the FeNHf mag-netic film have high transmissivity and Q vaule,which can better suppress the terahertz wave loss.
作者
赵磊
谈阳
章强
邢园园
赵云
张晓渝
Zhao Lei;Tan Yang;Zhang Qiang;Xing Yuanyuan;Zhao Yun;Zhang Xiaoyu(Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application,School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第3期201-206,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61107093)
江苏省十三五重点学科项目(20168765)
江苏省高等学校自然科学研究项目(19KJA140001)
江苏省研究生科研创新计划(KYCX20_2751)
苏州市低维光电材料与器件重点实验室资助项目(SZS201611)。
关键词
FeNHf
磁性薄膜
太赫兹波传输特性
高品质因子
太赫兹波损耗
磁导率
微纳工艺
FeNHf
magnetic film
terahertz wave transmission characteristic
high quality factor
terahertz wave loss
permeability
micro-nano process
