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基于金属介质交替膜超材料窄带滤色片的性能优化 被引量:1

Performance Optimization of the Metamaterial Narrowband Color Filter Based on the Metal-Dielectric Alternating Film
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摘要 超材料窄带滤色片由于结构紧凑、体积小、制备工艺简单和成本较低等优点,其常被用于光电探测和成像系统等领域。利用银和二氧化硅交替膜制备的周期性超材料狭缝阵列,实现了在可见光范围中心波长可调的窄带过滤颜色性能。研究了狭缝宽度、狭缝周期、金属银膜厚度与介质层厚度之间的比值和超材料厚度对该滤色片透射性能的调控规律,得到了具有较高透射效率且中心波长可调的窄带滤色片。最终实现半峰全宽17~30 nm、透射率约50%、在可见光500~760 nm波段实现中心波长可调且色纯度较好的滤色片。该结果为新型窄带滤色片的设计提供了崭新的思路。 Metamaterial narrowband color filters are often used in photoelectric detection and imaging systems because of the compact structure,small size,simple preparation process,low cost and so on.The periodic metamaterial slit array is made of alternating silver and silicon dioxide films,which achieves narrowband color filtering performance with adjustable central wavelength in the visible range.The regulation and control rules of the slit width,slit period,thickness ratio between the silver film and dielectric layer,and thickness of the metamaterial on the transmission performance of the color filter were studied.The narrowband color filter with high transmittance and adjustable center wavelength was obtained.Finally,the color filter with adjustable center wavelength and better color purity was realized in the visible light 500-760 nm band.The full width at half maximum and transmittance of the color filter are 17-30 nm and about 50%,respectively.The result provides a new idea for the design of new narrowband color filters.
作者 王启航 崔艳霞 张叶 王文艳 李国辉 郝玉英 Wang Qihang;Cui Yanxia;Zhang Ye;Wang Wenyan;Li Guohui;Hao Yuying(Key Laboratory of Advanced Transducers and Intelligent Control System of Ministry of Education,College of Physics and Optoelectronics,Taiyuan University of Technology,Taiyuan030024,Chin)
出处 《微纳电子技术》 北大核心 2019年第5期351-357,共7页 Micronanoelectronic Technology
基金 国家自然科学基金资助项目(61775156 61605136 61475109 U1710115) 山西省自然科学基金资助项目(201701D211002 201601D021051) 霍英东青年教师基金资助项目(20171402210001) 青年三晋学者资助项目
关键词 超材料 滤色片 窄带 中心波长可调 金属-介质交替膜 透射 metamaterial color filter narrowband adjustable center wavelength metal-dielectric alternating film transmission
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