摘要
随着功能性微结构的制造品质要求不断推向新的极端,超快激光微纳制造迎来了新的挑战,如更高的加工效率、跨尺度加工、选择性加工及可控性加工等。因传统超快激光高斯光束的空间和时间能量分布在加工中的局限性,以单点聚焦扫描为主的加工方法难以满足新的制造精度、效率和跨尺度加工要求。基于此,研究者将目光聚焦到超快激光光束整形的制造方法上。本文从传统超快激光光束的特点及其加工局限性角度出发,分空域光束整形、时域光束整形和时空域协同光束整形,介绍了超快激光光束整形技术的基本原理和主要实现途径;阐述了这些技术在功能性微结构制造方面的典型应用和研究进展;最后,总结和讨论了超快激光光束整形技术应用于功能性微结构制造中存在的问题和发展前景。
Significance As manufacturing quality requirements for functional microstructures increase,ultrafast laser micro/nanomanufacturing has brought new challenges related to high processing efficiency,cross-scale processing,and selective or controllable processing,etc.The limitations of the spatial and temporal energy distribution of traditional ultrafast laser Gaussian beams and processing methods based on single-point focus scanning make it difficult to meet the latest manufacturing accuracy,efficiency,and cross-scale processing requirements.Therefore,researchers focus their attention on manufacturing methods based on ultrafast laser beam shaping.Progress Laser beam shaping can be divided into two types:spatial beam shaping and temporal beam shaping.Spatial beam shaping refers to tailoring the distribution of laser energy in the space domain,whereas,temporal beam shaping refers to changing the distribution of laser energy in the time domain.Compared with a traditional Gaussian beam,a shaped beam has new spatial and temporal energy distribution,which can meet the manufacturing requirements of specific structures or applications.By shaping the spatial profile of an ultrafast laser beam,the fabrication of microstructures with various shapes can be directly realized on exposure to single or multiple laser pulses.Common laser shaping methods include the spatial light modulator method(Figs.1--3),lens array method(Fig.4),and beam superposition method.Based on spatial beam shaping,the processing methods such as ultrafast laser direct writing,induction,and deposition can be used for the one-step fabrication of special spatial profile microstructures(Figs.5 and 6),high aspect ratio microstructures,and optimized processing of microchannels,microstructure arrays(Fig.7),and laser-induced ordeposited microstructures.By spatial beam shaping,the application range of an ultrafast laser in the manufacturing of functional microstructures can be expanded,the efficiency and precision of which can be improved.Temporal beam shaping transf
作者
丁铠文
王聪
罗志
梁会勇
段吉安
Ding Kaiwen;Wang Cong;Luo Zhi;Liang Huiyong;Duan Ji'an(State Key Laboratory of High Performance and Com plex Manufacturing,College of Mechanical and Electrical Engineering,Central South University,Changsha,Hunan 410083,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2021年第2期53-66,共14页
Chinese Journal of Lasers
基金
国家重点研发计划(2017YFB1104300)
国家自然科学基金(51975595)。
关键词
激光光学
超快激光
光束整形
功能性微结构
高效制造
laser optics
ultrafast laser
pulse shaping
functional microstructure
efficient manufacturing
