期刊文献+

Parylene C薄膜微波电路的应用可行性研究 被引量:2

Application Feasibility of Parylene C Film in Microwave Circuit
下载PDF
导出
摘要 针对三防材料在微波电路中多余物防控方面的可行性、可靠性问题,提出在产品表面用真空化学气相沉积法镀Parylene C薄膜,结果表明该膜层可有效控制直径d小于1 mm的可动多余物,提高微波产品PIND(颗粒碰撞粒子检测)测试的合格率。同时与焊接、胶粘、互联、清洗等配装工艺有良好的适配性,且满足可靠性要求。该薄膜较高的绝缘强度,对微波电路有优异的绝缘防护作用。说明Parylene C薄膜材料在微波产品中具有应用可行性和潜在价值。 The coating material feasibility and reliability in the prevention and control of remnant material in micro wave circuits was studied.The vacuum chemical vapor deposition method to deposit Parylene C film on the product surface was proposed.The experimental results show that the film can effectively control the remnant material with a diameter of less than 1 mm,and improve the pass rate of particle impact noise detection test.In the meantime,the film has good compatibility with assembly processes such as welding,gluing,interconnecting,and cleaning and meets the reliability requirements.The film has high insulation strength and excellent insulation protection for microwave circuit.Consequently,the arylene C film has application feasibility and potential value in microwave products.
作者 张亚楠 孙鹏 周澄 ZHANG Yanan;SUN Peng;ZHOU Cheng(Xi'an Institute of Space Radio Technology,Xi'an 710000)
出处 《宇航材料工艺》 CAS CSCD 北大核心 2021年第1期55-59,共5页 Aerospace Materials & Technology
关键词 微波产品 Parylene C薄膜 真空化学气相沉积法 多余物 可行性 Microwave circuit Parylene C film Vacuum chemical vapor deposition method Remnant material Feasibility
  • 相关文献

参考文献5

二级参考文献17

  • 1高光辉,李卫华,颜德岳.尼龙1218的等温及非等温结晶动力学研究[J].高分子学报,2004,14(4):465-470. 被引量:20
  • 2王闯,钱蓉,孙晓玮,顾建忠.高增益自偏S波段MMIC低噪声放大器[J].Journal of Semiconductors,2005,26(4):786-789. 被引量:10
  • 3Beach W F, Lee C, Bassett D R, et al. Encyclopedia of Polymer Science and Engineering. New York: John & Wiley Sons, 1989. 990-1 025 被引量:1
  • 4Sean Pursel, Mark W Horn, Melik C Demirel, et al. Growth of sculptured polymer submicronwire assemblies by vapor deposition. Polymer, 2005, 46:9 544-9 548 被引量:1
  • 5Monk D J, Toh H S, Wertz J. Oxidative degradation of parylene C [ poly(monochloro-para-xylylene)] thin films on bulkmicromachined piezoresistive silicon pressure sensors. Sensors and Materials, 1997, 9(5): 307-319 被引量:1
  • 6Yang Lungjieh, Lin Weizhi, Yao Tzejung, et al. Photo-patternable gelatin as protection layers in low-temperature surface micromachinings. Sensors and Actuators (A), 2003, 103:284-290 被引量:1
  • 7Huang Hongliang, Xu Yongan, Hong Yee. Effects of film thickness on moisture sorption, glass transition temperature and morphology of poly(chloro-p-xylylene) film. Polymer , 2005, 46:5 949-5 955 被引量:1
  • 8Fortin J B, Lu T M. Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films. Thin Solid Films, 2001, (397): 223-228 被引量:1
  • 9CAMILLA K, CHRISTINA T, JANUSZ R, et al. Investigation of Parylene-C on the performance of millimeter wave circuits [J]. IEEE Trans Microwave Theory Tech, 2006, 54(8): 3417 -3424. 被引量:1
  • 10ROSA R L, HASAN S, SAEED M, et al. On the study of Parylene N for millimeter-wave integrated circuits [C]// IEEE Adv Packg Mater Symposium. New Jersey: IEEE Inc, 2007:147-151. 被引量:1

共引文献6

同被引文献19

引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部