摘要
目的研究压电驱动器结构参数对其驱动性能的影响,并对其结构进行优化,为进一步研究压电喷墨的喷射特性奠定基础。方法总结近年来压电喷墨印刷技术的研究现状,利用有限元数值模拟软件Comsol Multiphysics建立压电驱动器的数值模型,分析压电薄膜PZT、SiO_(2)振动板和Parylene保护层这3个部分的结构尺寸对压电驱动器位移的影响规律,并且利用正交试验方法确定压电驱动器主要部件的最优尺寸。结果压电驱动器的结构尺寸对其振幅有较大影响,不同的结构组合可以得到不同的压电驱动器位移。在压电薄膜与振动板宽度之比为0.7,振动板宽度为140μm,保护层厚度为0.7μm,振动板厚度为0.9μm,压电薄膜厚度为1μm时,驱动器位移达到最大。结论通过对压电驱动器的结构尺寸进行优化,可使驱动器位移达到最大,从而使其驱动性能最优。
The work aims to study the influence of structural parameters of piezoelectric actuator on its driving performance,and optimize its structure,so as to lay a foundation for further research on the jet characteristics of piezoelectric inkjet.The research status of piezoelectric inkjet printing technology in recent years was summarized.The numerical model of piezoelectric actuator was established by finite element numerical simulation software Comsol Multiphysics.The influence rule of structure size of PZT,SiO_(2) vibrating plate and Parylene protective layer on the displacement of piezoelectric actuator was analyzed.The optimal size of the main components of the piezoelectric actuator was determined by orthogonal test.The structure size of the piezoelectric actuator had great influence on its amplitude,and the displacement of the actuator could be obtained by different structure combinations.The displacement of the actuator reached the maximum when the ratio of the width of the piezoelectric film to the vibration plate was 0.7,the width of the vibration plate was 140μm,the thickness of the protective layer was 0.7μm,the thickness of the vibration plate was 0.9μm,and the thickness of the piezoelectric film was 1μm.By optimizing the structure size of the piezoelectric actuator,the displacement of the actuator can be maximized,so that its driving performance can be optimized.
作者
武秋敏
徐磊
袁方
武吉梅
WU Qiu-min;XU Lei;YUAN Fang;WU Ji-mei(Faculty of Printing,Packing and Digital Media Technology,Xi'an University of Technology,Xi'an 710048,China)
出处
《包装工程》
CAS
北大核心
2021年第5期187-192,共6页
Packaging Engineering
基金
陕西省教育厅重点科学研究计划(20JY054)。
关键词
压电喷墨
结构优化
正交试验
piezoelectric inkjet
structure optimization
orthogonal test
