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Parylene C膜的热降解行为 被引量:2

The degration kinetic of paryelene C film
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摘要 采用微分-积分法和裂解质谱研究了聚氯代对二甲苯膜(Parylene C膜)的非等温热降解行为。实验结果表明,Parylene C膜在N2中的热降解符合二级化学反应,其动力学模型方程式为dα/dt=Aexp(-E/RT)(1-α)2,平均表观活化能E=139kJ/mol,在N2中裂解产物主要为芳香烃和芳香醛。 The kinetic process of payrlene C degradation film was studied by combing the non-isothermal differential and integral methods. The components of decomposition were characterized by mass-spectrum. The experiment results indicated that the associated kinetic mechanism was second order chemical reaction: da/dt= Aexp(- E/RT)(1- α)^2 , The average activation energy E was 139kJ/mol , The components of decomposition were aromaticities.
出处 《化工新型材料》 CAS CSCD 北大核心 2008年第7期36-37,44,共3页 New Chemical Materials
基金 表面物理与化学国家重点实验基金资助(基金号:90000460200604)
关键词 聚氯代对二甲苯膜 非等温动力学 热解反应 parylene C, non-isothermal kinetic, thermal degradation
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