摘要
表面具有微沟槽结构的回转体可作为压辊模具应用于滚动压印工艺,实现微结构的快速复制,也可应用于耐磨减摩及编码轮制造等诸多方面。采用基于干膜的化学刻蚀加工技术,以304不锈钢回转体为研究对象,提出了一种通过优选刻蚀液成分及刻蚀温度等参数并添加刻蚀后抛光工艺步骤从而减小微沟槽侧蚀量的方法。研究结果表明,本方法具有成本低、易操作等优点,可以有效地提高微结构的尺寸精度,最终得到的微沟槽平均线宽约60μm且线宽的相对误差低至1.55%。
The rotating body with miero-groove structure on the surface can be used as a roller mold in rlling embossing process to realize rapid replication of micro-structure,and can also be used in many aspects such as wear resistance and friction reduction and coding wheel manufacturing.In this paper,the chemical etching technology based on dry-film was used as the processing technology,and the 304 stainless steel rotating body was taken as the research object.A method was proposed to reduce the lateral erosion amount of micro groove by optimizing the parameters such as etching solution composition and etching temperature and then adding the polishing step after etching.The research result shows that the method has the advantages of low cost and easy operation,and can ffectively improve the dimensional accuracy of the microstructure.The average linewidth of the miero-grove array is about 60μm and the relative error of linewidth is as low as1.55%.
作者
杜立群
张希
肖海涛
于洋
王胜羿
关发龙
Du Liqun;Zhang Xi;Xiao Haitao;Yu Yang;Wang Shengyi;Guan Falong(Key Laboralory for Precision and Non-Traditional Machining Technology of the Ministry of Education,Dalian University of technology,Dalian,Liaoning 116024,CHN;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian,Liaoning 116024,CHN)
出处
《模具制造》
2021年第2期73-78,共6页
Die & Mould Manufacture
关键词
微沟槽阵列
干膜
化学刻蚀
侧蚀量
micro-groove array
dry-film
chemical etching
lateral erosion
