摘要
作为一种工作在简并模态的陀螺,嵌套环式MEMS陀螺因其更强的抗冲击特性、对外界振动更低的敏感性以及更灵活的电极配置等优势被作为一个重要的微机电陀螺发展方向。然而,在加工过程中产生的谐振结构不对称误差会导致陀螺模态不匹配,严重限制陀螺的性能。面对批量化生产的谐振器,需要用一种便于实施的结构误差辨识方法挑选高品质的谐振器加工高性能陀螺。本文分析了刚度轴偏角误差和电极未对准误差对陀螺的影响。然后,提出了基于静电修调理论的误差辨识方法。最后,用三支嵌套环陀螺完成了辨识实验,证实了方法的可行性,辨识过程中得到的修调电压还可直接用于静电修调。
As a kind of wineglass mode gyroscope,the multiring disk resonator gyroscope(DRG)has attracted much attention for its superior shock resistance,low sensitivity to environmental vibration and abundant tuning electrodes.However,the structural imperfections generated during fabrication process will cause the mode mismatch and severely restrict the performance of the gyroscope.Facing with mass-produced resonators,it is urgent to use an easy-to-implement methods to select high-quality resonators for high-performance gyroscopes.In this paper,the influence of normal mode axis azimuth angle and sense axis misalignment angle is analyzed.Based on the electrostatic tuning theory,we proposed a method to identify these two defects.Last,three DRGs were utilized for identification experiment and the results verified its feasibility.The tuning voltage during the identification can be used for electrostatic compensation.
作者
宋国雄
何汉辉
高凯
李青松
许一
路阔
吴学忠
肖定邦
SONG Guoxiong;HE Hanhui;GAO Kai;LI Qingsong XU Yi;LU Kuo;WU Xuezhong;XIAO Dingbang(College of Intelligence Science and Engineering,National University of Defense Technology,Changsha Hu'nan 410073,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2020年第10期1419-1424,共6页
Chinese Journal of Sensors and Actuators
基金
国家重点研发计划项目(2018YFB2002304)
国家自然科学基金项目(51575521)。
