摘要
设计了一种采用微机电系统(MEMS)技术的绝缘体上硅(SOI)与玻璃阳极键合工艺的陀螺仪。分析了提高陀螺仪性能的主要手段,结合实际工艺能力,设计了较大电容极板正对面积的器件。利用真空腔、网络分析仪、跨阻放大器、直流电源,进行扫频实验,得到了器件的幅频响应特性。基于MEMS陀螺仪的工作原理,设计静电调修的方法,实现了器件驱动轴和敏感轴的谐振频率裂解从293.75 Hz缩小到6.25 Hz。
A micro-electro-mechanical system(MEMS)gyroscope based on silicon-on-insulator(SOI)and glass anodic bonding process is designed.The main means to improve performance of the gyroscope is analyzed.Combined with actual process capability,the device with larger area of the capacitor plate is designed.Amplitude frequency response characteristics of the device is obtained by frequency scanning experiment using a vacuum chamber,a network analyzer,a transimpedance amplifier,and a DC power supply.Based on the working principle of the MEMS gyroscope,electrostatic tuning method is designed to reduce the resonant frequency split between the drive axis and the sensitive axis of the device from 293.75 Hz to 6.25 Hz.
作者
张林欣
王俊铎
沈文江
ZHANG Linxin;WANG Junduo;SHEN Wenjiang(School of Nano Technology and Nano Bionics,University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China)
出处
《传感器与微系统》
CSCD
2020年第5期71-73,80,共4页
Transducer and Microsystem Technologies
关键词
微机电系统(MEMS)陀螺仪
静电调修
圆盘结构
阳极键合
micro-electro-mechanical system(MEMS)gyroscope
electrostatic tuning
disk structured
anode bonding
