摘要
超高真空计广泛应用于超高真空环境下的精确压力测量,也是目前唯一实际可用的超高真空测量仪器。本文基于Bayard-Alpert原理研制了一种超高真空计,开展了电子运动轨迹的模拟仿真计算和实验研究,分析了发射电流对规管灵敏度值的影响。结果表明,测量范围为10^-9~10^-2 Pa量级时,灵敏度平均值为0.145 Pa^-1,波动为±15%,10^-8~10^-2 Pa范围内,灵敏度平均值为0.148 Pa^-1,波动为±6%,实验测试结果与理论计算结果具有良好一致性。超高真空计的控制系统中的名义灵敏度设置为0.15 Pa^-1,对其测量结果开展精确校准,校准范围为2.190×10^-9~1.128×10^-2 Pa,校准结果的修正因子为1.02,扩展不确定为15%(k=2)。
Ultrahigh vacuum gauge is widely applied in accurate pressure measurements,and it is also the only practical ultrahigh vacuum measurement instrument available at present.Based on the well-known Bayard-Alpert principle,an ultrahigh vacuum gauge is developed.The electron trajectory simulations and experiments are carried out,and the influence of emission current on the sensitivity of the gauge is analyzed.The results show that the sensitivity in the range of 10^-9~10^-2 Pa is 0.145 Pa-1 with fluctuation of±15%,while in 10^-8^-10^-2 Pa is 0.148 Pa-1 with fluctuation of±6%.The experimental results are in good agreement with the theoretical calculation results.The nominal sensitivity in the control system of the ultrahigh vacuum gauge is set as 0.15 Pa-1.The gauge is calibrated accurately,the calibration range is 2.190×10^-9~1.128×10^-2 Pa,the correction factor of calibration result is 1.02,and the expanded uncertainty is 15%(k=2).
作者
张虎忠
李得天
成永军
孙健
李刚
ZHANG Hu-zhong;LI De-tian;CHENG Yong-jun;SUN Jian;LI Gang(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;Institute of Mass Spectrometer and Atmospheric Environment,Jinan University,Guangzhou 511486,China)
出处
《真空电子技术》
2020年第4期63-68,共6页
Vacuum Electronics
基金
国家自然科学基金项目(61601211,61671226,61627805,41904166)。
关键词
超高真空
真空测量
电离真空计
灵敏度
真空校准
Ultrahigh vacuum
Vacuum measurement
Ionization gauge
Sensitivity
Vacuum calibration
