摘要
总结了极高真空(XHV低于10-9Pa的压力范围)获得和测量方法以及获得和测量极高真空的限制因素,描述了降低XHV系统器壁和元件(包括真空规或残余气体分析器)出气率采用的技术。
Methods for producing and measuring extreme high vacuum（XHV,which is the pressure range below 10^-9 Pa）and the limits on measurement and production are examined. Techniques for reducing the outgassing rates of the walls and components of XHV systems,including the gauges or RGAs, are described.
出处
《宇航计测技术》
CSCD
2009年第5期71-76,共6页
Journal of Astronautic Metrology and Measurement
关键词
极高真空
真空泵
电离规
出气率
Extreme high vacuum Pump Ionization gauge ＋ Outgassing rate
