摘要
针对GaN光电阴极制备净化与激活超高真空系统工艺要求特点,我们研究设计了超真空系统总体结构、抽取装置和高温退火净化装置,根据超高真空系统控制的工艺流程、方法和自动控制要求,提出了以PLC和组态软件为控制核心,对净化与激活装置的真空度、温度和升降机构等参数进行控制的方法。并设计了超高真空自动监控系统中的PLC的操作单元、执行单元、数据采集单元、执行机构硬件结构、控制系统人机界面,以及PLC控制程序和组态软件。GaN光电阴极制备净化与激活超高真空系统具有完全的可视化和数字化,抗干扰能力强,可促进阴极制备超高真空装置的应用和工艺水平的提高。
According to the characteristics of the process requirements of the ultra-high vacuum system for GaN photocathode preparation purification and activation,the overall structure of the ultra-high vacuum system,the extraction device and the hightemperature annealing purification device are studied and designed.According to the requirements of ultra-high vacuum system control and automatic temperature control digital control,the PLC and configuration software are proposed as the control core to control the vacuum degree,temperature,lifting mechanism and other parameters of the purification and activation device.The hardware structure design of the operation unit,execution unit,data acquisition unit and execution mechanism of the PLC in the ultra-high vacuum automatic monitoring system and the software design of the human-computer interface of the control system are carried out.The PLC control program and configuration software are designed according to the requirements.The GaN photocathode preparation purification and activation ultra-high vacuum system is completely visualized and digitized,and has strong anti-interference ability,effectively promoting the improvement and application of the cathode preparation ultra-high vacuum system and process level.
作者
陈伟
李坤
CHEN Wei;LI Kun(School of Mechanical Engineering,Anhui University of Science and Technology,Huainan Anhui 232001,China)
出处
《长沙大学学报》
2023年第2期28-31,37,共5页
Journal of Changsha University
基金
安徽省高校自然科学研究重点项目,编号:KJ2019A0112。
