摘要
四氯化硅氢化生产三氯氢硅技术的应用能有效处理多晶硅生产线产生的大量四氯化硅,从而极大降低多晶硅的生产成本,实现工业硅粉制备高纯多晶硅的工艺闭路循环,因此提升四氯化硅的转化率,进而降低企业经济成本是一项重要研究内容。以四氯化硅氢化生产三氯氢硅为主要内容,结合实际生产过程,从工艺流程、反应原理和影响因素三个方面详细分析了四氯化硅氢化生产三氯氢硅的流程,进而展现出该技术中的优势和劣势,促进企业对相关技术研究的进一步深入。
The application of the technology for the production of trichlorosilane by the hydrogenation of silicon tetrachloride can effectively deal with a large amount of silicon tetrachloride produced by the polysilicon production line,thereby greatly reducing the production cost of polysilicon,and realizing the closed-loop process of industrial silicon powder to produce high-purity polysilicon.It is an important research content to better improve the conversion rate of silicon tetrachloride and then reduce the economic cost of enterprises.The main content is the production of trichlorosilane from the hydrogenation of silicon tetrachloride,combined with the actual production process,a detailed analysis of the process of the production of trichlorosilane from the hydrogenation of silicon tetrachloride from the three aspects of process flow,reaction principle and influencing factors,and then shows The advantages and disadvantages of this technology promote the further in-depth study of related technologies by enterprises.
出处
《化工设计通讯》
CAS
2020年第3期185-186,共2页
Chemical Engineering Design Communications
关键词
四氯化硅
氢化
三氯氢硅
silicon tetrachloride
hydrogenation
silicon trichlorosilane
