摘要
针对集成电路制造、超精密检测仪器及微机电系统加工制造等领域对大行程、多自由度、高速及高精度运动平台日益迫切的需求,提出一种新型大行程三自由度宏微运动平台。该平台采用直线电动机与压电陶瓷进行宏微双重驱动,采用直线光栅与平面光栅实现双闭环位置反馈与控制。基于该平台结构设计,确定其位置正解方程与位置逆解方程,并列举算例验证。基于ADAMS软件对平台进行运动仿真,分析不同驱动类型与驱动参数对运动平台位移、速度及加速度的影响。最后,针对宏微双重驱动传动的精度问题进行实验研究。结果表明,该平台运动学方程正确有效,具有较好的动态响应性与运动规划性,且该种驱动传动形式满足大行程、高速及高精度的性能要求。
The research and development of large-stroke,multi-freedom,high-speed and high-precision motion stage are becoming more and more urgent in the industries of integrated circuit manufacturing,ultra-precision detection instruments,micro electrical mechanical system processing and manufacturing equipment etc. Presents a 3-DOF macro-micro motion stage with large-stroke.The stage adopts a linear motor and a piezoelectric ceramic to drive the macromotion and the micromotion,respectively. A dual closed-loop position feedback control is achieved in the stage by adopting a linear grating and a planar grating. Based on the structural design of the stage,the position forward solution equation and position inverse solution equation of the model are determined,which are verified by examples. the motion simulation of the stage is carried out based on ADAMS software,and the influence of different driving types and driving parameters on the displacement,velocity and acceleration of the stage are analyzed. Finally,the precision of macro-micro dual drive transmission is studied experimentally. The results show that the kinematics equation of the stage is correct and effective,and it has good dynamic response and motion planning performance,and this kind of drive transmission form meets the big travel,high speed,high precision performance request.
作者
张金迪
高健
钟耿君
张揽宇
王晓亮
王佳印
Zhang Jindi;Gao Jian;Zhong Gengjun;Zhang Lanyu;Wang Xiaoliang;Wang Jiayin(Key Laboratory of Microelectronic Precision Manufacturing Technology and Equipment Education ofMinistry of Education,Guangdong University of Technology,Guangzhou 510006,China)
出处
《现代制造工程》
CSCD
北大核心
2019年第8期125-129,共5页
Modern Manufacturing Engineering
基金
国家自然科学基金项目(51675106,U1601202)
广东高校建设重大科研项目(17ZK0091)
关键词
宏微运动平台
双闭环
运动学
仿真
macro-micro motion stage
double closed loop
kinematic
simulation
