摘要
设计一种超高加速度宏微运动平台,将运动过程分为五个工作状况,针对不同工况中的平台,采用有限元方法,展开静态受力分析,获得相应变形和应力分布云图,对其相关载荷参数影响规律进行探究。进一步通过动态特性分析计算,获得前六阶固有频率和振动模态,其中第一阶固有频率高于超高加速度宏微运动平台驱动频率,避免了系统共振的发生。利用锤击振动测试实验进行验证,结果证明模拟仿真数据的正确性。研究结果对微电子制造产业飞速发展及其设备更新换代具有十分重要的意义。
In this paper,an ultra-high acceleration macro-motion platform is designed to divide the motion process into five working conditions.For the platform in different working conditions,the finite element method is used to develop static analysis and obtain corresponding deformation and stress distribution.The influence trends of relevant load parameters is explored,and the first six natural frequencies and vibration modes are obtained through dynamic characteristic analysis and calculation.The first natural frequency is higher than ultra-high acceleration macro micro motion platform driving frequency,which avoids system resonance.occur.The hammer vibration test was used to verify the results,and the results proved the correctness of simulation data.The research results are of great significance to the rapid development of the microelectronics manufacturing industry and the upgrading of its equipment.
作者
张璐凡
韩红安
聂福全
张振强
李雪丽
吴军
ZHANG Lufan;HAN Hongan;NIE Fuquan;ZHANG Zhenqiang;LI Xueli;WU Jun(School of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou 450001,CHN;Henan Weihua Heavy Machinery Co.Ltd.,Changyuan 453400,CHN;Weihua Group Co.,Ltd., Changyuan 453400,CHN;School of Mechanical and Electronic Engineering, Zhongyuan University of Technology,Zhengzhou 450007,CHN)
出处
《制造技术与机床》
北大核心
2019年第9期59-64,共6页
Manufacturing Technology & Machine Tool
基金
国家青年科学基金项目(51705132)
河南省科技厅自然科学项目(172102210215)
河南省博士后基金
河南省教育厅自然科学项目(17A460008)
关键词
超高加速度宏微运动平台
多工况
静态分析
动态分析
ultra-high acceleration macro-micro motion platform
multi-cases
static analysis
dynamic analysis
