摘要
本研究阐述了氮化铝(AlN)陶瓷激光切割的工作原理,并通过对影响AlN陶瓷激光切割深度的激光功率、频率、脉宽、加工速度以及辅助气压等工艺参数因素进行试验和分析,得出了光纤激光切割氮化铝陶瓷材料的最优参数范围。
This paper expounds the working principle of laser cutting for aluminum nitride(AlN)ceramic.Process parameters impacting cutting depth in AlN ceramic laser cutting including laser power,frequency,pulse width,processing speed and auxiliary pressure are tested and analyzed,and the optimum parameter range of optical fiber laser cutting process for aluminum nitride ceramic is obtained.
出处
《真空电子技术》
2017年第4期46-49,共4页
Vacuum Electronics
关键词
氮化铝
激光
陶瓷加工
切割深度
Aluminum nitride
Laser
Ceramic processing
Cutting depth
