摘要
综述了 ULSI互连中纳米多孔二氧化硅 (NPS)电介质主要品种干燥凝胶 (Xerogel)的典型制造工艺 ,给出并分析了介电常数、应力、热导率和机械强度等主要特性 。
The fabrication process for the main breed of nanoporous silica (NPS), xerogel, which is applied for ULSI interconnect, is summarized in this paper. The characters of the dielectric constant, stress, thermal conductivity and mechanical strength of NPS are discussed. Finally, the application prospect of xerogel in ULSI interconnect is reviewed.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2002年第3期349-354,共6页
Research & Progress of SSE
