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表征ULSI低介电常数互连材料机械特性的表面波频散特性 被引量：4

Dispersive Characteristics of Surface Acoustic Waves for Measuring Mechanical Properties of Low-k Dielectrics Used in ULSI
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摘要 研究了在Si(100)衬底上淀积低k薄膜的分层结构中表面波沿Si[100]和[110]晶向传播的速度频率色散特性,给出了表面波色散特性的理论推导,得到了低k薄膜的杨氏模量、密度、厚度和泊松常数对色散关系的影响. The dispersive characteristics of SAW propagating along both the Si[-100] and [-110] directions on the layered structure,with the low-k thin film deposited on the silicon （100） substrate, were studied in detail. The theoretical equations to obtain dispersion curves of SAW were derived. The effects of the Young＇ modulus, density, thickness, and Poisson＇s ratio of the low-k films on the dispersive characteristics were found.
作者 李志国 肖夏 张鑫慧 姚素英
机构地区 天津大学电子信息工程学院
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第10期2032-2037,共6页 半导体学报（英文版）
基金 国家自然科学基金(批准号:60406003) 教育部留学回国人员科研启动基金资助项目~~
关键词 低介电常数介质 表面波 频散特性 杨氏模量 low-k dielectrics SAW dispersive characteristics Young＇s modulus
分类号 TN405.97 [电子电信—微电子学与固体电子学]
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参考文献10

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二级参考文献5

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共引文献43

同被引文献61

  • 1邵淑英,田光磊,范正修,邵建达.沉积参量及时效时间对SiO_2薄膜残余应力的影响[J].光学学报,2005,25(1):126-130. 被引量：14
  • 2肖夏,张鑫慧,姚素英.表面波方法表征纳米多孔SiO_2薄膜机械特性的对准技术[J].纳米技术与精密工程,2005,3(2):122-125. 被引量：1
  • 3肖夏,白茂森,李志国,姚素英.LSAWs测量低介电常数介质薄膜杨氏模量的信号处理[J].天津大学学报,2007,40(5):554-558. 被引量：2
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Journal of Semiconductors
2005年 第10期

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