摘要
碲镉汞材料生长过程对温度要求很高,为提高碲镉汞材料的生长效率和生长质量,设计了一套液相外延生长(LPE)退火炉温度控制系统。该系统以PLC作为逻辑控制器,以欧陆表作为温度控制器,搭配可控硅输出模块实现系统温度的调节与控制。PLC通过Modbus通信协议与欧陆表进行通信,完成对模拟量数据的采集与处理,并对生产过程进行顺序控制。组态软件作为人机交互界面,完成系统运行过程中的数据记录和动态显示。该温度控制系统在实际应用中操作方便,控温精准,运行稳定。
To increase the growth efficiency and quality of Hg1-xCdxTe, a temperature control system for liquid phase epitaxy growth annealing furnace was designed. The system takes a programmable logic controller(PLC) as the logic controller, uses the Eurotherm Meter as the temperature control to regulate the temperature with the traic. PLC communicates with the Eurotherm meters through the Modbus protocol to collect analog data and deal with them, and then control the process of production. Useing the configuration software as the human-computer interface to display the frame dynamically and record the data in the process of system operation. The annealing furnace is easy to operate, precise in temperature control and stable in practical application.
作者
鲁明祥
Lu Mingxiang(University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《电子测量技术》
2019年第1期49-53,共5页
Electronic Measurement Technology
